1.

Conference Proceedings
Conference Proceedings
1. Smoothing of substrate roughness by carbon-based layers prepared by pulsed laser deposition (PLD)
Braun, S. ; Bendjus, B. ; Foltyn, T. ; Menzel, M. ; Schreiber, J. ; Leson, A.
Pub. info.: Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA.  pp.75-84,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5533
2.

Conference Proceedings
Conference Proceedings
2. Determination of deformation fields by atomic force acoustic microscopy [6175-11]
Bendjus, B. ; Kohler, B. ; Heuer, H. ; Rabe, U. ; Striegler, A.
Pub. info.: Testing, Reliability, and Application of Micro- and Nano-Material Systems IV.  pp.617509-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6175
3.

Conference Proceedings
Conference Proceedings
3. Carbon buffer layers for smoothing substrates of EUV and x-ray multilayer mirrors
Braun, S. ; Bendjus, B. ; Foltyn, T. ; Menzel, M. ; Schreiber, J. ; Weissbach, D.
Pub. info.: Testing, Reliability, and Application of Micro- and Nano-Material Systems II.  pp.132-140,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5392
4.

Conference Proceedings
Conference Proceedings
4. Micro- and nano-NDE in the laboratory for acoustic diagnosis and quality assurance
Koehler, B. ; Schreiber, J. ; Bendjus, B. ; Herms, M. ; Melov, V. ; Helfen, L. ; Mikulik, P. ; Baumbach, T.
Pub. info.: Testing, Reliability, and Application of Micro- and Nano-Material Systems II.  pp.63-77,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5392
5.

Conference Proceedings
Conference Proceedings
5. Materials characterization of micro-devices
Schreiber, J. ; Bendjus, B. ; Kyhler, B. ; Melov, V. ; Baumbach, T.
Pub. info.: Testing, Reliability, and Application of Micro- and Nano-Material Systems II.  pp.266-271,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5392