1.

Conference Proceedings
Conference Proceedings
1. Development of a high-average-power extreme-ultraviolet electric capillary discharge source
Fornaciari,N.R. ; Bender,H. ; Buchenauer,D. ; Kanouff,M.P. ; Karim,S. ; Kubiak,G.D. ; Moen,C.D. ; Shimkaveg,G.M. ; Silfvast,W.T. ; Stewart,K.D.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.226-231,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
2.

Conference Proceedings
Conference Proceedings
2. High-power plasma discharge source at 13.5 nm and 11.4 nm for EUV lithography
Silfvast,W.T. ; Klosner,M. ; Shimkaveg,G.M. ; Bender,H. ; Kubiak,G.D. ; Fornaciari,N.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.272-275,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
3.

Conference Proceedings
Conference Proceedings
3. Focused Ion Beam and Transmission Electron Microscopy for Process Development
Bender,H.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.232-247,  1999.  Pennington, N.J..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3895
4.

Conference Proceedings
Conference Proceedings
4. Ferromagnetic Clusters in In1-xMnxAs
Esch,A.Van ; Roy,W.Van ; Boeck,J.De ; Francois,I. ; Bender,H. ; Borghs,G. ; Bockstal,L.Van ; Bogaerts,R. ; Herlach,F.
Pub. info.: II-VI compounds and semimagnetic semiconductors : joint proceedings of the Third European Workshop on II-VI Compounds, Linz, Austria, 26-28 September 1994, and the Fourth International Workshop on Semimagnetic (Diluted Magnetic) Semiconductors, Linz, Austria, 26-28 September 1994.  pp.623-626,  1995.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 182-184
5.

Conference Proceedings
Conference Proceedings
5. Defects in as-grown silicon and their evolution during beat treatments
Vanhellemont,J. ; Doruberger,E. ; Esfandyari,J. ; Kissinger,G. ; Trauwaert,M.-A. ; Bender,H. ; Graf,D. ; Lambert,U. ; Ammon,W.von
Pub. info.: Defects in semiconductors, icds-19 : proceedings of the 19th International Conference on Defects in Semiconductors, Aveiro, Portugal, July 1997.  Part1  pp.341-346,  1997.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 258-263
6.

Conference Proceedings
Conference Proceedings
6. Comparison between wet HF etching and vapor HF etching for sacrificial oxide removal
Witvrouw,A. ; Bois,B.Du ; Moor,P.De ; Verbist,A. ; Hoof,C.A.Van ; Bender,H. ; Baert,K.
Pub. info.: Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA.  pp.130-141,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4174