1.

Conference Proceedings
Conference Proceedings
1. Stress Generation in PECVD silicon Nitride Thin Films for Microelectronics Applications
Belyansky, M. ; Klymko, N. ; Madan, A. ; Mallikarjunan, A. ; Li, Y. ; Chakravarti, A. ; Deshpande, S. ; Domenicucci, A. ; Bedell, S. ; Adams, E. ; Coffin, J. ; Tai, L. ; Sun, S-P. ; Widodo, J. ; Lai, C-W.
Pub. info.: Materials, technology and reliability of advanced interconnects - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.97-102,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 863
2.

Conference Proceedings
Conference Proceedings
2. Stress Generation in PECVD Silicon Nitride Thin Films for Microelectronics Applications
Belyansky, M. ; Klymko, N. ; Madan, A. ; Mallikarjunan, A. ; Li, Y. ; Chakravarti, A. ; Deshpande, S. ; Domenicucci, A. ; Bedell, S. ; Adams, E. ; Coffin, J. ; Tai, L. ; Sun, S-P. ; Widodo, J. ; Lai, C-W.
Pub. info.: Thin films : stresses and mechanical properties XI : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.325-332,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 875
3.

Conference Proceedings
Conference Proceedings
3. Low Temperature Borophosphosilicate Glass (BPSG) Process for High Aspect Ratio Gap Fill
Belyansky, M. ; Conti, R. ; Upham, A. ; Liucci, F. ; Parks, C. ; Lee, K.-H. ; Strane, J.
Pub. info.: Rapid thermal and other short-time processing technologies III : proceedings of the international symposium.  pp.47-52,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-11
4.

Conference Proceedings
Conference Proceedings
4. Comparison of the Hafnium Diboride(0001) and Hafnium(0001) Surfaces
Belyansky, M. ; Trenary, M. ; Otani, S. ; Tanaka, T.
Pub. info.: Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.463-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 441