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18 results

Conference Proceedings

1. Compact electron-based EUV source

Egbert, A. ; Tkachenko, B. ; Ostendorf, A. ; Becker, S. ; Chichkov, B.N.

Pub. info.:	Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany. pp.265-268, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5063

Conference Proceedings

2. Ageing of optical components under laser irradiation at 532nm [5963-64]

Becker, S. ; Delrive, L. ; Bouchut, P. ; Andre, B. ; Geffraye, F.

Pub. info.:	Advances in optical thin films II : 13-15 September 2005, Jena, Germany. pp.59631R-, 2005. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5963

Conference Proceedings

3. Electron-based microfocus soft-x-ray source and applications

Egbert, A. ; Tkachenko, B. ; Becker, S. ; Chichkov, B.N.

Pub. info.:	X-ray sources and optics : 2-3 August 2004, Denver, Colorado, USA. pp.64-74, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5537

Conference Proceedings

4. E-beam direct-write lithography for the 45-nm node using the novel STEAG HamaTech single substrate coat-bake-develop ModuTrack

Egbert, A. ; Becker, S. ; Chichkov, B. N.

Pub. info.:	Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA. pp.609-618, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5751

Conference Proceedings

5. Compact debris-free EUV source for advanced mirror metrology

Egbert, A. ; Tkachenko, B. ; Becker, S. ; Chichkov, B.N.

Pub. info.:	Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA. pp.1-9, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5533

Technical Paper

6. Numerical and Experimental Investigation on Flow Induced Noise from a Square Cylinder

Kaltenbacher, M. ; Escobar, M. ; Ali, I. ; Hahn, C. ; Becker, S.

Pub. info.:	AIAA meeting papers on disc. 2004. [Reston, Va.]. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA/CEAS Aeroacoustics Conference
Ser. no.:	10th

Technical Paper

7. 1st Order Boom Noise Relationship to Driveline Imbalance.

Becker, S. ; Beyer, C. ; McAfee, R.

Pub. info.:	2005 SAE Noise and Vibration Conference and Exhibition : technical paper. 2005. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2005

Technical Paper

8. Investigation of the Acoustic Sources and their Propagation for a FV/FE Coupled Computation using different grids

Escobar, M. ; Ali, I. ; Kaltenbacher, M. ; Becker, S.

Pub. info.:	AIAA meeting papers on disc. 2005. [Reston, Va.]. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA/CEAS Aeroacoustics Conference
Ser. no.:	11th

Technical Paper

9. Experimental and Numerical Investigation of the Flow Induced Noise from a Forward Facing Step

Becker, S. ; Escobar, M. ; Hahn, C. ; Ali, I. ; Kaltenbacher, M. ; Basel, B. ; Grunewald, M.

Pub. info.:	AIAA meeting papers on disc. 2005. [Reston, Va.]. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA/CEAS Aeroacoustics Conference
Ser. no.:	11th

10.

Technical Paper

10. Flow and Turbulence Structure in the Wake of a Simplified Car Model.

Lienhart, H. ; Becker, S.

Pub. info.:	2003 SAE world congress : technical paper. 2003. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2003

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Author: Becker, S.