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Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.336-343, 1997. Pennington, NJ. Electrochemical Society
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.272-280, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.264-271, 1994. Pennington, NJ. Electrochemical Society
George, M.A. ; Beck, S.E. ; Bohling, D.A. ; Hames, G.A. ; Wortman, J.J. ; Melzak, J.A.
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AIchE 1994 Annual Meeting : November 13-18 San Francisco Hilton and Towers Hotel, San Francisco, California. 1994. New York. American Institute of Chemical Engineers
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.166-174, 1995. Pennington, NJ. Electrochemical Society
George, M.A. ; Hess, D.W. ; Beck, S.E. ; Young, K.M. ; Roberts, D.A. ; Vrtis, R. ; Voloshin, G. ; Bobling, D.A. ; Lane, A.P.
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Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.175-183, 1995. Pennington, NJ. Electrochemical Society