1.

Conference Proceedings
Conference Proceedings
1. SELECTIVE RAPID THERMAL CVD OF GERMANIUM
Grider, D.T. ; Ozturk, M.C. ; Wortman, J.J. ; Littlejohn, M.A. ; Zhong, Y. ; Batchelor, D. ; Russell, P.
Pub. info.: In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.147-154,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 158
2.

Conference Proceedings
Conference Proceedings
2. In-Sity Boron-Doped Si1-xGex Gate Technology for Submicron NMOS- and PMOS-FETs
OEztuerk, M.C. ; Batchelor, D. ; Venables, D. ; Maher, D.M.
Pub. info.: ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology.  pp.549-560,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-3
3.

Conference Proceedings
Conference Proceedings
3. ELECTRICAL AND STRUCTURAL CHARACTERIXATION OF POLYSILICON DEPOSITED IN A RAPID THERMAL PROCESSOR
Xen, R. ; OztOrk, k, M. C. ; Wortman, J. J. ; Batchelor, D. ; Maher, D. ; Blat, C. ; Niccolian, E.
Pub. info.: Polysilicon thin films and interfaces.  pp.29-34,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 182
4.

Conference Proceedings
Conference Proceedings
4. OXIDE REMOVAL ON SILICON BY RAPID THERMAL PROCESSING USING SiH2Cl2 AND H2
Ren, X. ; Ozturk, M. C. ; Harris, G. ; Batchelor, D. ; Maher, D. M.
Pub. info.: Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.243-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 342
5.

Conference Proceedings
Conference Proceedings
5. Rapid Thermal Chemical Vapor Deposition of Polycrystalline Silicon-Germanium Films on SiO2 and Their Properties
Li, V. Z-Q ; Mirabedini, M. R. ; Kuehn, R. T. ; Gladden, D. ; Batchelor, D. ; Christenson, K. ; Wortman, J. J. ; Ozturk, M. C. ; Maher, D. M.
Pub. info.: Polycrystalline thin films II : structure, properties, and applications : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.333-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 403