Search records | 東京工業大学附属図書館文献データベース

You can search for articles included in proceedings of international conferences and technical papers which Tokyo Tech Library holds.
Tokyo Tech members can obtain tables of contents of 17,000 foreign journals by SwetScan. Tokyo Tech Library does not cover all of them.
List of Searchable Databases

Clear Form

Search for other sites by same keyword(s).

CiNii Books

NDL Search

WebcatPlus

amazon

カーリル

WorldCat

Filter

Title:

Author:

ISBN / ISSN / Paper No:

Source Title:

Publisher:

Publication Year:

～

Clear Form

Type:

Conference Proceedings

Technical Paper

Academic Journal

Select: Check all | Remove all

Sort order

10 | 50 | 100 / Per Page

25 results

Conference Proceedings

1. Reliable materials and instruments for 157-nm lithography (Abstract Only)

Vogler,K. ; Voss,F. ; Bergmann,E. ; Stamm,U. ; Walecki,W.J. ; Basting,D.

Pub. info.:	Laser-induced damage in optical materials, 2000 : 32nd Annual Boulder Damage Symposium, proceedings, 16-18, October, 2000, Boulder, Colorado. pp.445-446, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4347

Conference Proceedings

2. High-accuracy microdrilling of steel with solid state UV laser at a rate of 10 mm/sec

Govorkov,S.V. ; Slobodtchikov,E.V. ; Wiessner,A.O. ; Basting,D.

Pub. info.:	Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA. pp.365-370, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3933

Conference Proceedings

3. High-power ultraviolet all-solid-state laser for industrial applications

Mehlmann,C. ; Schroder,T. ; Klopp,P. ; Koch,R. ; Stamm,U. ; Basting,D.

Pub. info.:	Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California. pp.396-402, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3618

Conference Proceedings

4. ArF excimer laser for 193-nm lithography

Stamm,U. ; Patzel,R. ; Kleinschmidt,J. ; Vogler,K. ; Zschocke,W. ; Bragin,I. ; Basting,D.

Pub. info.:	Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.1010-1013, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3334

Conference Proceedings

5. High-repetition-rate excimer lasers for DUV Lithography

Stamm,U. ; Paetzel,R. ; Bragin,I. ; Berger,V. ; Klaft,I. ; Kleinschmidt,J. ; Osmanov,R. ; Schroeder,T. ; Vogler,K. ; Zschocke,W. ; Basting,D.

Pub. info.:	Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part2 pp.1050-1057, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3679

Conference Proceedings

6. Excimer laser for 157-nm lithography

Stamm,U. ; Bragin,I. ; Govorkov,S.V. ; Kleinschmidt,J. ; Patzel,R. ; Slobodtchikov,E. ; Vogler,K. ; F.Voｦﾂ ; Basting,D.

Pub. info.:	Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California. Part2 pp.816-826, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3676

Conference Proceedings

7. Prospects for very high repetition rate lasers for microlithography

Bragin,I. ; Berger,V. ; Patzel,R. ; Stamm,U. ; Targsdorf,A. ; Kleinschmidt,J. ; Basting,D.

Pub. info.:	Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA. Part2 pp.1445-1451, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4000

Conference Proceedings

8. History and future prospects of excimer lasers

Basting,D. ; Pippert,K.D. ; Stamm,U.

Pub. info.:	Second International Symposium on Laser Precision Microfabrication : 16-18 May 2001, Singapore. pp.25-34, 2001. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4426

Conference Proceedings

9. Extreme ultraviolet light generation based on laser-produced plasmas(LPP)and gas-discharge-based pinch plasmas:a comparison of different concepts

Schriever,G. ; Rahe,M. ; Neff,W. ; Bergmann,K. ; Lebert,R. ; Lauth,H. ; Basting,D.

Pub. info.:	Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA. pp.162-168, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3997

10.

Conference Proceedings

10. Extreme-ultraviolet source development: a comparison of different concepts

Dusterer,S. ; Rahe,M. ; Rebhan,U. ; Basting,D. ; Walecki,W.J. ; Lauth,H. ; Lebert,R. ; Bergmann,K. ; Hoffmann,D. ; Rosier,O. ; Neff,W. ; Poprawe,R. ; Sauerbrey,R.A. ; Schwoerer,H. ; Ziener,C. ; Nickles,P.V. ; Stiehl,H. ; Will,I. ; Sandner,W.

Pub. info.:	Soft X-ray and EUV imaging systems : 3-4 August 2000, San Diego, USA. pp.113-120, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4146

25 results

Select: Check all | Remove all

Sort order

10 | 50 | 100 / Per Page

Filtering by:

Author: Basting,D.