1.

Conference Proceedings
Conference Proceedings
1. Development of an automated multiple-target mask CD disposition system to enable new sampling strategy [6152-58]
Ma, J. ; Farnsworth, J. ; Bassist, L. ; Cui, Y. ; Mammen, B. ; Padmanaban, R. ; Nadamuni, V. ; Kamath, M. ; Buckmann, K. ; Neff, J. ; Freiberger, P.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61521K-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
2.

Conference Proceedings
Conference Proceedings
2. Reduction of radial CD errors and Cr loading effects in 90-nm binary NCAR mask process through chrome etch DOE
Ma, J. ; Li, C. ; Bassist, L. ; Pekney, M. ; Wilcox, N. ; Farnsworth, J. ; Lauder, E. ; Krishnakumar, B.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.167-175,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567