Armelao, L. ; Barreca, D. ; Tondello, E. ; Battision, G.A. ; Gerbasi, R. ; Zanella, P. ; Barison, S. ; Daolio., S. ; Fabrizio, M.
Pub. info.:
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.373-380, 2001. Pennington, N.J.. Electrochemical Society
Barreca, D. ; Depero, L. ; Franzato, E. ; Rizzi, G.A. ; Sangaletti, L. ; Tondello, E. ; Vettori, U.
Pub. info.:
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.952-965, 1997. Pennington, NJ. Electrochemical Society
Barreca, D. ; Benetollo, F. ; Bozza, M. ; Bozza, S. ; Carta, G. ; Cavinato, G. ; Rossetto, G. ; Zanella, P.
Pub. info.:
Chemical processing of dielectrics, insulators and electronic ceramics : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.69-, 2000. Warrendale. MRS-Materials Research Society
Armelao, L. ; Barreca, D. ; Bottaro, G. ; Gasparotto, A. ; Maragno, C. ; Tondello, E.
Pub. info.:
EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium. pp.506-517, 2005. Pennington, NJ. Electrochemical Society