1.

Conference Proceedings
Conference Proceedings
1. MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing (Invited Paper)
Villarroya, M. ; Verd, J. ; Teva, J. ; Abadal, G. ; Figueras, E. ; Barniol, N.
Pub. info.: Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain.  pp.78-85,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5836
2.

Conference Proceedings
Conference Proceedings
2. Large-signal model of a resonating cantilever-based transducer for system level electrical simulation
Verd, J. ; Teva, J. ; Abadal, G. ; Perez-Murano, F. ; Esteve, J. ; Barniol, N.
Pub. info.: Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain.  pp.98-106,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5836
3.

Conference Proceedings
Conference Proceedings
3. Optical integrated waveguides characterization by scanning near-field optical microscope
Borrise, X. ; Barniol, N. ; Perez-Murano, F. ; Abadal, G. ; Aymerich, X. ; Jimenez, D.
Pub. info.: Optical microstructural characterization of semiconductors : sympoisum held November 29-30, 1999, Boston, Massachusetts, U.S.A..  pp.37-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 588
4.

Conference Proceedings
Conference Proceedings
4. SPECTROSCOPIC CHARACTERIZATION OF NANOSCALE MODIFICATION OF PASSIVATED Si(100) SURFACE BY STM
Perez-Murano, F. ; Barniol, N. ; Aymerich, X.
Pub. info.: Determining nanoscale physical properties of materials by microscopy and spectroscopy.  pp.549-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 332
5.

Conference Proceedings
Conference Proceedings
5. Band-pass transimpedance read-out circuit for UHF MEMS resonator applications
Campanella, H. ; Uranga, A. ; Davis, Z. ; Esteve, J. ; Teres, L. ; Barniol, N.
Pub. info.: VLSI Circuits and Systems II.  pp.300-309,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5837
6.

Conference Proceedings
Conference Proceedings
6. Resonating cantilever mass sensor with mechanical on-plane excitation
Teva, J. ; Abadal, G. ; Jord, X. ; Borrise, X. ; Davis, Z. ; Barniol, N.
Pub. info.: Smart Sensors, Actuators, and MEMS.  1  pp.353-363,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5116
7.

Conference Proceedings
Conference Proceedings
7. Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems
Martin, C. ; Davis, Z. ; Forsen, E. ; Dong, M. ; Montserrat, J. ; Abadal, G. ; Perez-Murano, F. ; Borrise, X. ; Boisen, A. ; Barniol, N.
Pub. info.: Nanotechnology.  pp.189-196,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5118
8.

Conference Proceedings
Conference Proceedings
8. SOI-silicon as structural layer for NEMS applications
Villarroya, M. ; Figueras, E. ; Perez-Murano, F. ; Campabadal, F. ; Esteve, J. ; Barniol, N.
Pub. info.: Smart Sensors, Actuators, and MEMS.  1  pp.1-11,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5116