1.

Conference Proceedings
Conference Proceedings
1. Product and tool control using integrated auto-macro defect inspection in the photolithography cluster [6152-65]
Menon, V. C. ; Isaacson, R. L. ; Nicholls, M. C. ; Lickteig, S. J. ; Forstner, T. ; Barnett, A. R. ; Mulhall, J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61521R-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
2.

Conference Proceedings
Conference Proceedings
2. Optimization of an integrated and automated macro inspection system for the utilization of wafer color variation detection in a photolithography cluster [6152-130]
Lickteig, S. J. ; Forstner, T. W. ; Barnett, A. R. ; Dixon, D. S. ; Menon, V. C. ; Isaacson, R. L. ; Nicholls, M. C. ; Liu, Y. ; Kinikouglu, P.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61523B-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152