Patrick, H. J. ; Attota, R. ; Barnes, B. M. ; Germer, T. A. ; Stocker, M. T. ; Silver, R. M. ; Bishop, M. R.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XX. pp.61520J-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Silver, R. M. ; Barnes, B. M. ; Attota, R. ; Jun, J. ; Filliben, J. ; Soto, J. ; Stocker, M. ; Lipscomb, P. ; Marx, E. ; Patrick, H. J.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XX. pp.61520Z-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering