1.

Conference Proceedings

Conference Proceedings
Bao, J.F. ; Yuan, Y. ; Cao, Z.H. ; Wu, X.
Pub. info.: MEMS/MOEMS Technologies and Applications.  pp.222-224,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4928
2.

Conference Proceedings

Conference Proceedings
Cao, Z.H. ; Yuan, Y. ; Bao, J.F. ; Wu, X.
Pub. info.: MEMS/MOEMS Technologies and Applications.  pp.225-227,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4928