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Conference Proceedings

1. Applications of silicon-germanium-carbon in MOS and bipolar transistors (Invited Paper)

Banerjee,S.K.

Pub. info.:	Microelectronic Device Technology : 1-2 October 1997, Austin, Texas. pp.118-128, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3212

Conference Proceedings

2. High-Mobility Heterostructure PMOSFET Using Strain-Compensated SiGeC Channel

Ray,S.K. ; John,S. ; Oswal,S. ; Banerjee,S.K.

Pub. info.:	Physics of - Semiconductor Devices -. Part 2 pp.1044-1047, 1998. New Delhi. Narosa Publishing House
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3316

Conference Proceedings

3. SiGe/Si vertical PMOSFET device design and fabrication

Liu,K.C. ; Oswal,S.K. ; Ray,S.K. ; Banerjee,S.K.

Pub. info.:	Microelectronic Device Technology : 1-2 October 1997, Austin, Texas. pp.336-341, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3212

Conference Proceedings

4. Si1-x-yGexCy channel heterojunction PMOSFETs

John,S. ; Ray,S.K. ; Oswal,S.K. ; Banerjee,S.K.

Pub. info.:	Microelectronic Device Technology : 1-2 October 1997, Austin, Texas. pp.354-359, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3212

Conference Proceedings

5. Novel Strained-Si Heterostructure NMOSFETs on Solid Phase Epitaxially Grown Relaxed Si1-xGex

Ray,S.K. ; John,S. ; Banerjee,S.K.

Pub. info.:	Proceedings of the Tenth International Workshop on the Physics of Semiconductor Devices (December 14-18, 1999). Part2 pp.883-886, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3975

Conference Proceedings

6. Layer-to-layer alignment for step and flash imprint lithography

Choi,B.J. ; Meissl,M.J. ; Colbrun,M. ; Bailey,T.C. ; Ruchhoeft,P. ; Sreenivasan,S.V. ; Prins,F. ; Banerjee,S.K. ; Ekerdt,J.G. ; Willson,C.G.

Pub. info.:	Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA. pp.436-442, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4343

Conference Proceedings

7. Low-energy BF2,BCI2,and BBr2 implants for ultrashallow P+-N Junctions

Nandan,S.R. ; Agarwal,V. ; Banerjee,S.K.

Pub. info.:	Microelectronic Device Technology : 1-2 October 1997, Austin, Texas. pp.147-150, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3212

Conference Proceedings

8. Strained Si NMOSFET on relaxed Si1-XGeX formed by ion implantation of Ge

John,S. ; Ray,S.K. ; Oswal,S.K. ; Banerjee,S.K.

Pub. info.:	Microelectronic Device Technology : 1-2 October 1997, Austin, Texas. pp.129-133, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3212

Conference Proceedings

9. Microwave Plasma Oxidation of Strain-Compensated Si1-x-yGexCy Films

Ray,S.K. ; Bera,L.K. ; John,S. ; Banerjee,S.K. ; Maiti,C.K.

Pub. info.:	Physics of - Semiconductor Devices -. Part 1 pp.664-667, 1998. New Delhi. Narosa Publishing House
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3316

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Conference Proceedings

10. Automation of a remote plasma-enhanced chemical vapor deposition system using LabVIEW

Sharma,R. ; Fretwell,J.L. ; Vaihinger,J. ; Banerjee,S.K.

Pub. info.:	Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III. pp.119-126, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3213

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Author: Banerjee,S.K.