Baltagi, Y. ; Bru, C. ; Benyattou, T. ; Gracia-Perez, M. A. ; Guillot, G. ; Gendry, M. ; Leclercq, J. L. ; Drouot, V. ; Hollinger, G.
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Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.199-, 1994. Pittsburgh. MRS - Materials Research Society
Baltagi, Y. ; Bearzi, E. ; Bru-Chevallier, C. ; Benyattou, T. ; Guillot, G. ; Harmand, J. C.
Pub. info.:
Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.333-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society