Ritenour, A. ; Lee, M. ; Lu, N. ; Bai, W. ; Yu, S. ; Fitzgerald, E. ; Kwong, D.L. ; Antoniadis, D.
Pub. info.:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.406-411, 2004. Pennington, NJ. Electrochemical Society