1.

Conference Proceedings
Conference Proceedings
1. Influence of the Height Difference between the First and Second Nitride Layer on Erosion and Dishing in the Dual Nitride Approach for Shallow Trench Isolation
Heylen, N. ; Grillaert, J. ; Vrancken, E ; Badenes, G. ; Rooyackers, R. ; Meuris, M. ; Heyns, M.
Pub. info.: Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing.  pp.26-36,  1998.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-7
2.

Conference Proceedings
Conference Proceedings
2. Optimization of Polysilicon-Encapsulated LOCOS for 0.25 μm CMOS: Correlation Between Stress and Gate Oxide Integrity
Badenes, G. ; Rooyackers, R. ; De Wolf, I. ; Deferm, L.
Pub. info.: ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology.  pp.467-478,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-3
3.

Conference Proceedings
Conference Proceedings
3. L-Shape Spacer Architecture for Low Cost, High Performance CMOS
Augendre, E. ; Perello, C. ; Vandamme, E.P. ; Pochet, S. ; Rooyackers, R. ; Beckx, S. ; De Potter, M. ; Lauwers, A. ; Badenes, G.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.297-304,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-2
4.

Conference Proceedings
Conference Proceedings
4. 0.13 μm CMOS Technology with Optimized Poly-Si/No-Oxide Gate Stack
Kubicek, S. ; Jansen, P. ; Badenes, G. ; Schaekers, M. ; Koldyaev, V. ; Deferm, L. ; De Meyer, K. ; Kerr, D. ; Naem, A.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.193-202,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
5.

Conference Proceedings
Conference Proceedings
5. A New Dummy-free Shallow Trench Isolation Concept for Mixed-Signal Applications
Badenes, G. ; Rooyackers, R. ; Augendre, E. ; Vandamme, E. ; Perello, C. ; Heylen, N. ; Grillaert, J. ; Deferm, L.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.231-242,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
6.

Conference Proceedings
Conference Proceedings
6. Lifetime and Leakage Current Studies in Shallow P-N Junctions
Poyai, A. ; Simoen, E. ; Claeys, C. ; Rooyackers, R. ; Badenes, G. ; Gaubas, E.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.403-413,  2000.  Bellingham, Wash..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-17
7.

Conference Proceedings
Conference Proceedings
7. Optimization of the Active Area Edge Protection in Shallow Trench Isolation
Augendre, E. ; Rooyackers, R. ; Pochet, S. ; Grau, L. ; Sleeckx, F. ; Vandamme, E.P. ; Badenes, G.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.539-546,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-2
8.

Conference Proceedings
Conference Proceedings
8. SSRM and SCM Observation of Modified Lateral Diffusion of As, BF2 and Sb Induced by Nitride Spacers
Eyben, P. ; Duhayon, N. ; Stuer, C. ; Wolf, I. De ; Rooyackers, R. ; Clarysse, T. ; Vandervorst, W. ; Badenes, G.
Pub. info.: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 669
9.

Conference Proceedings
Conference Proceedings
9. Optical sensing based on localized surface plasmons
Quidant, R. ; Enoch, S. ; Kreuzer, M. ; Badenes, G.
Pub. info.: Photonic Materials, Devices, and Applications.  pp.272-283,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5840
10.

Conference Proceedings
Conference Proceedings
10. Optical forces on a Rayleigh dielectric particle in a patterned near-field landscape
Zelenina, A. ; Quidant, R. ; Petrov, D. ; Badenes, G.
Pub. info.: Photonic Materials, Devices, and Applications.  pp.304-314,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5840