1.

Conference Proceedings
Conference Proceedings
1. Design considerations for an electron-beam pattern generator for the 130-nm generation of masks
Abboud, F. E. ; Babin, S. V. ; Chakarian, V. ; Ghanbari, A. ; Innes, R. ; Raymond III, F. ; Sagle, A. L. ; Sauer, C. A.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.385-399,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748
2.

Conference Proceedings
Conference Proceedings
2. Propagation of resist heating mask error to wafer level [6349-193]
Babin, S. V. ; Karklin, L.
Pub. info.: Photomask Technology 2006.  pp.634950-634950,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349