1.
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Conference Proceedings
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Stone, E. M. ; Hintersteiner, J. D. ; Cebuhar, W. A. ; Albright, R. ; Eib, N. K. ; Latypov, A. ; Baba-Ali, N. ; Poultney, S. K. ; Croffie, E. H.
Pub. info.: |
Emerging Lithographic Technologies X. pp.61512E-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6151 |
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2.
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Conference Proceedings
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Croffie, E.H. ; Eib, N. ; Callan, N.P. ; Baba-Ali, N. ; Latypov, A. ; Hintersteiner, J. ; Sandstrom, T. ; Bleeker, A. ; Cummings, K.D.
Pub. info.: |
23rd Annual BACUS Symposium on Photomask Technology. pp.842-850, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5256 |
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3.
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Conference Proceedings
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Baba-Ali, N. ; Sewell, H. ; Kreuzer, J.
Pub. info.: |
Optical Microlithography XVI. Part Three pp.1352-1362, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5040 |
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