1.

Conference Proceedings
Conference Proceedings
1. Chromium(VI)-free Defect Etching Solutions for Application on Engineered Silicon Substrates
J. Maehliss ; A. Abbadie ; F. Brunier ; B.O. Kolbesen
Pub. info.: High Purity Silicon 10.  pp.309-320,  2008.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 16(6)
2.

Conference Proceedings
Conference Proceedings
2. Organic Peracid Etches: A New Class of Chromium Free Etch Solutions for the Delineation of Defects in Different Semiconducting Materials
D. Possner ; B.O. Kolbesen ; H. Cerva ; V. Kluppel
Pub. info.: Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007) (plus Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes).  pp.21-31,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 10(1)