B.-S. Nam ; J. Moon ; J.-H. Jeong ; D.-H. Kong ; S. Oh
Pub. info.:
Design for manufacturability through design-process integration II : 28-29 February 2008, San Jose, California, USA. pp.692514-1-692514-7, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering