1.

Conference Proceedings
Conference Proceedings
1. Binary and attenuated PSM mask evaluation for sub 50nm device development perspective
J. Moon ; B.-S. Nam ; J.-H. Jeong ; D.-H. Kong ; B.-H. Nam
Pub. info.: Optical Microlithography XXI.  2  pp.692436-1-692436-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924
2.

Conference Proceedings
Conference Proceedings
2. Automatic residue removal for high-NA extreme illumination
J. Moon ; B.-S. Nam ; J.-H. Jeong ; D.-H. Kong ; B.-H. Nam
Pub. info.: Photomask technology 2007.  3  pp.67304B-1-67304B-7,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730