1.

Conference Proceedings
Conference Proceedings
1. On the quality of measured optical aberration coefficients using phase wheel monitor
L. V. Zavyalova ; A. R. Robinson ; A. Bourov ; N. V. Lafferty ; B. W. Smith
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
2.

Conference Proceedings
Conference Proceedings
2. Mask enhancement using an evanescent wave effect
N. V. Lafferty ; J. Zhou ; B. W. Smith
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
3.

Conference Proceedings
Conference Proceedings
3. Immersion lithography with numerical apertures above 2.0 using high index optical materials
J. Zhou ; N. V. Lafferty ; B. W. Smith ; J. H. Burnett
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
4.

Conference Proceedings
Conference Proceedings
4. Quantum state control interference lithography and trim double patterning for 32-16-nm lithography
R. D. Frankel ; B. W. Smith ; A. Estroff
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
5.

Conference Proceedings
Conference Proceedings
5. Design of the Discovery Channel Telescope mount
D. T. Finley ; C. Squires ; B. A. McCreight ; B. W. Smith ; T. Chylek
Pub. info.: Ground-based and airborne telescopes II.  3  pp.70124I-1-70124I-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7012
6.

Conference Proceedings
Conference Proceedings
6. Outlook for potential third-generation immersion fluids
J. Lopez-Gejo ; J. T. Kunjappu ; J. Zhou ; B. W. Smith ; P. Zimmerman ; W. Conley ; N. J. Turro
Pub. info.: Advances in resist materials and processing technology XXIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6519