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Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007) (plus Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes). pp.151-160, 2007. Pennington, N.J.. Electrochemical Society
S. Mertens ; Y. Cho ; F. Nouri ; R. Schreutelkamp ; Y. Kim ; P. Verheyen ; J. Steenbergen ; C. Vrancken ; H. Bender ; O. Richard ; B. Van Daele ; W. Vandervorst ; P. Absil ; S. Kubicek ; C. Demeurisse ; Z. Tokei ; A. Lauwers ; L. Geenen
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Advanced gate stack, source/drain and channel engineering for Si-based CMOS 2: new materials, processes, and equipment. pp.139-148, 2006. Pennington, NJ. Electrochemical Society
B. J. Pawlak ; R. Duffy ; T. Hoffman ; S. Seven ; S. Feich ; P. Eyhen ; B. Van Daele ; W. Vandervorst ; R. J. Lander
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Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment. pp.351-364, 2007. Pennington, NJ. Electrochemical Society