1.

Conference Proceedings
Conference Proceedings
1. Development of a novel x-ray focusing technique using crystals with a two-dimensionally modulated surfaces
W.Z. Chang ; E.-B. Kley ; H.-J. Fuchs ; B. Schnabel ; E. Förster
Pub. info.: X-ray microbeam technology and applications : 11-12 July, 1995, San Diego, California.  pp.69-77,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2516
2.

Conference Proceedings
Conference Proceedings
2. New alignment marks for improved measurement maturity
U. Weidenmueller ; H. Alves ; B. Schnabel ; B. Icard ; L. Pain
Pub. info.: EMLC 2008 : 24th European Mask and Lithography Conference : 21-24 January 2008, Dresden, Germany.  pp.679211-1-679211-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6792