P. A. Zimmerman ; J. Byers ; B. Rice ; C. K. Ober ; E. P. Giannelis
Pub. info.:
Advances in resist materials and processing technology XXV. 1 pp.69230A-1-69230A-10, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
P. A. Zimmerman ; J. Byers ; E. Piscani ; B. Rice ; C. K. Ober
Pub. info.:
Advances in resist materials and processing technology XXV. 1 pp.692306-1-692306-10, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering