1.

Conference Proceedings
Conference Proceedings
1. Thermo-Mechanical Reliability of 3-D-Integrated Microstructures in Stacked Silicon
Bernhard Wunderle ; R. Mrossko ; O. Wittler ; E. Kaulfersch ; P. Ramm ; B. Michel ; H. Reichl
Pub. info.: Enabling technologies for 3-D integration : symposium held November 27-29, 2006, Boston, Massachusetts, U.S.A..  pp.67-78,  2007.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 970
2.

Conference Proceedings
Conference Proceedings
2. Kinetics of Silanol Condensation for Low-Temperature Direct Bonding
M. Eichler ; B. Michel ; M. Thomas ; C. Klages
Pub. info.: Semiconductor Wafer Bonding 10: Science, Technology, and Applications.  pp.369-376,  2008.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 16(8)
3.

Conference Proceedings
Conference Proceedings
3. Strain and displacement measurements for microsystem technology
D. Vogel ; R. Kühnert ; B. Michel
Pub. info.: Interferometry '94 : photomechanics : 16-20 May 1994, Warsaw, Poland.  pp.209-218,  1994.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2342
4.

Technical Paper
Technical Paper
4. Validation and benefits of a homogeneous effusion cooling model for combustor RANS simulations
N. Savary ; B. Michel ; P. Gajan
Pub. info.: AIAA meeting papers on disc.  2009.  Reston, Va..  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 2009
5.

Technical Paper
Technical Paper
5. Full Coverage Film Cooling: Comparison of Experimental and Numerical Data
B. Michel ; P. Gajan ; A. Strzelecki ; B. Wagner ; N. Savary ; A. Kourta
Pub. info.: AIAA meeting papers on disc.  2008.  Reston, Va..  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit
Ser. no.: 2008
6.

Technical Paper
Technical Paper
6. Numerical Simulation of Shock/Boundary-Layer Self-Sustained Oscillations for External and Internal Flows
D. Alfano ; B. Michel ; C. Corre ; A. Lerat
Pub. info.: AIAA meeting papers on disc.  2006.  Reston, Va.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA Applied Aerodynamics Conference
Ser. no.: 2006
7.

Conference Proceedings
Conference Proceedings
7. NanoDAC: object deformation measurements for micro and nanotechnology applications
J. Keller ; D. Vogel ; B. Michel
Pub. info.: Nanosensors, microsensors, and biosensors and systems 2007 : 21-22 March 2007, San Diego, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6528
8.

Conference Proceedings
Conference Proceedings
8. Measurement of stresses in MEMS structures by stress release
D. Vogel ; N. Sabate ; A. Gollhardt ; B. Michel
Pub. info.: Nanosensors, microsensors, and biosensors and systems 2007 : 21-22 March 2007, San Diego, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6528