Proceedings of the 5th International Conference on Space Optics : 30 March-2 April 2004, Toulouse, France. 2004. Noordwijk, The Netherlands. ESA Publications Division
Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California. pp.221-231, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California. pp.460-469, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California. pp.470-478, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Optical/laser microlithography VIII : 22-24 February, 1995, Santa Clara, California. pp.541-549, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering