1.

Conference Proceedings
Conference Proceedings
1. Study of mask structure for 45-nm node based on manufacturability and lithographic performance
J. G. Doh ; C. H. Park ; Y. S. Moon ; B. H. Kim ; S. W. Kwon ; S. Y. Choi ; S. H. Kim ; S. Y. Kim ; B. G. Kim ; S. G. Woo ; H. K. Cho
Pub. info.: Photomask and next-generation lithography mask technology XIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6607
2.

Conference Proceedings
Conference Proceedings
2. Fabrication and third-order nonlinearity of germano-silicate glass fiber incorporated with Au nanoparticles
A. Lin ; B. H. Kim ; S. Ju ; W. Han
Pub. info.: Quantum dots, particles, and nanoclusters IV : 22-23 January 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6481
3.

Conference Proceedings
Conference Proceedings
3. The study of attenuated PSM structure for extreme ultraviolet lithography with minimized mask shadowing effect
C. Y. Jeong ; B. H. Kim ; T. G. Kim ; S. Lee ; E. J. Kim
Pub. info.: Emerging lithographic technologies XII.  2  pp.69213Q-1-69213Q-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6921