1.

Conference Proceedings

Conference Proceedings
Avci, Ibrahim ; Law, Mark E.
Pub. info.: Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A..  pp.249-254,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 717
2.

Conference Proceedings

Conference Proceedings
Avci, Ibrahim ; Law, Mark E. ; Jasper, Craig ; Rueda, Hernan A. ; Thoma, Rainer
Pub. info.: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 669