1.

Conference Proceedings
Conference Proceedings
1. LOW TEMPERATURE ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION OF GROUP 14 OXIDE FILMS
Hoffman, David M. ; Atagi, Lauren M. ; Chu, Wei-Kan ; Liu, Jia-Rui ; Zheng, Zongshuang ; Rubiano, Rodrigo R. ; Springer, Robert W. ; Smith, David C.
Pub. info.: Polycrystalline thin films : structure, texture, properties, and applications : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.523-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 343
2.

Conference Proceedings
Conference Proceedings
2. Plasma Enhanced Chemical Vapor Deposition of Zirconium Nitride Thin Films
Atagi, Lauren M. ; Samuels, John A. ; Smith, David C. ; Hoffman, David M.
Pub. info.: Covalent ceramics III - science and technology of non-oxides : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.289-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 410