1.

Conference Proceedings

Conference Proceedings
Hofling,R. ; Aswendt,P. ; Neugebauer,R.
Pub. info.: Optical measurement systems for industrial inspection : 16-17 June 1999, Munich, Germany.  pp.338-345,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3824
2.

Conference Proceedings

Conference Proceedings
Lopez,D. ; Dubslaff,J. ; Hofling,R. ; Aswendt,P.
Pub. info.: Lasers in material processing : 16-20 June, 1997, Munich, FRG.  pp.692-697,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3097
3.

Conference Proceedings

Conference Proceedings
Holstein,D. ; Aswendt,P. ; Hofling,R. ; Schmidt,C.-D ; Juptner,P.O.
Pub. info.: Laser interferometry IX : applications : 22-23 July 1998, San Diego, California.  pp.264-273,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3479
4.

Conference Proceedings

Conference Proceedings
Aswendt,P. ; Schmidt,C.-D. ; Zielke,D. ; Schubert,S.
Pub. info.: Microsystems Engineering: Metrology and Inspection.  pp.43-50,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4400
5.

Conference Proceedings

Conference Proceedings
Aswendt,P. ; Hofling,R. ; Hiller,K.
Pub. info.: Materials and Device Characterization in Micromachining II.  pp.50-60,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3875
6.

Conference Proceedings

Conference Proceedings
Aswendt,P. ; Hofling,R.
Pub. info.: Optical Inspection and Micromeasurements.  pp.152-159,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2782