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Conference Proceedings

1. Laser PG performance for 100-nm photomasks

Rosling, M. ; Karawajczyk, A. ; Askebjer, P. ; Zerne, R. ; Carroll, A.M. ; Eklund, R. ; Fosshaug, H. ; Sandstrom, T.

Pub. info.:	22nd Annual BACUS Symposium on Photomask Technology. Part Two pp.759-766, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4889

Conference Proceedings

2. Improved photomask accuracy with a high-productivity DUV laser pattern generator [6349-34]

ostrom, T. ; Mahlen, J. ; Karawajczyk, A. ; Rosling, M. ; Carlqvist, P. ; Askebjer, P. ; Karlin, T. ; Sallander, J. ; osterberg, A.

Pub. info.:	Photomask Technology 2006. pp.63490Y-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6349

Conference Proceedings

3. Influence of writing strategy on CD control for the spatial-light-modulator-based Sigma7300 DUV laser pattern generator

Fosshaug, H. ; Askebjer, P. ; Karlsson, J. ; Bajramovic, A. ; Xing, K. ; Eklund, R. ; Walford, J. ; Ekberg, M. ; Hogfeldt, P. ; ystrym, T.

Pub. info.:	Advances in Resist Technology and Processing XXI. pp.879-894, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5376

Conference Proceedings

4. A high-end mask writer using a spatial light modulator (Invited Paper)

Ljungblad, U.B. ; Askebjer, P. ; Karlin, T. ; Sandstrom, T. ; Sjoberg, H.

Pub. info.:	MOEMS Display and Imaging Systems III. pp.43-52, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5721