1.

Conference Proceedings
Conference Proceedings
1. Fault detection and estimation of wafer warpage profile during thermal processing in microlithography
Arthur Tay ; Weng Khuen Ho ; Ni Hu ; Ying Zhou
Pub. info.: 2004 AIChE annual meeting, Austin Covention Center, Austin, Texas, November 7-12 : conference proceedings.  pp.411f-,  2004.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE Conference Proceedings
Ser. no.: P-213
2.

Conference Proceedings
Conference Proceedings
2. In-situ Measurement and Control for Photoresist Processing in Microlithography
Arthur Tay ; Weng-Khuen Ho ; Xiaodong Wu ; Choon-Meng Kiew
Pub. info.: 2004 AIChE annual meeting, Austin Covention Center, Austin, Texas, November 7-12 : conference proceedings.  pp.411b-,  2004.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE Conference Proceedings
Ser. no.: P-213
3.

Conference Proceedings
Conference Proceedings
3. Iterative Feedback Tuning Control of Photoresist Film Thickness Uniformity
Ying Zhou ; Weng-Khuen Ho ; Arthur Tay ; Jiewen Deng ; Boon-Keng Lok
Pub. info.: 03 AIChE annlual meeting, November 16-21, San Francisco, California, AIChE 2003 annual meeting conference proceedings.  pp.428a-,  2003.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE Conference Proceedings
Ser. no.: P-201
4.

Conference Proceedings
Conference Proceedings
4. Control and Signal Processing for Photoresist Processing in Microlithography
Arthur Tay ; Weng-Khuen Ho ; Khiang-Wee Lim ; Ai-Poh Loh ; Woei-Wan Tan
Pub. info.: 03 AIChE annlual meeting, November 16-21, San Francisco, California, AIChE 2003 annual meeting conference proceedings.  pp.439r-,  2003.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE Conference Proceedings
Ser. no.: P-201
5.

Conference Proceedings
Conference Proceedings
5. 242b. Combined Data Reconciliation and Parameter Estimation
Xuan-Tien Doan ; Boon Sim Thian ; Yen Yen Joe ; Arthur Tay
Pub. info.: 2005 annual meeting & fall showcase : '05 AIChE, Oct 30 - Nov 4 : conference proceedings, Cincinnati Convention Center, Cincinnati, OH : non-topical presentation records : 10. Computing and Systems Technology Division.  2005.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE Conference Proceedings
Ser. no.: P-221(2)