Armelao, L. ; Barreca, D. ; Tondello, E. ; Battision, G.A. ; Gerbasi, R. ; Zanella, P. ; Barison, S. ; Daolio., S. ; Fabrizio, M.
Pub. info.:
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.373-380, 2001. Pennington, N.J.. Electrochemical Society
Monaco, G. ; Garoli, D. ; Frison, R. ; Mattarello, V. ; Nicolosi, P. ; Pelizzo, G. M. ; Rigato, V. ; Armelao, L. ; Giglia, A. ; Nannarone, S.
Pub. info.:
Advances in X-ray/EUV optics, components, and applications : 14-16 August 2006, San Diego, California, USA. pp.631712-631712, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Armelao, L. ; Barreca, D. ; Bottaro, G. ; Gasparotto, A. ; Maragno, C. ; Tondello, E.
Pub. info.:
EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium. pp.506-517, 2005. Pennington, NJ. Electrochemical Society
Better ceramics through chemistry VII : organic/inorganic hybrid materials : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.387-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society