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15 results

Conference Proceedings

1. Residue-free Etching of Al-Si-Cu Alloys Employing Magnetron RIE

Hattori, K. ; Hori, M. ; Aoyama, M.

Pub. info.:	Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control. pp.264-274, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-21

Conference Proceedings

2. Charge Damage Caused by Electron Shading Effect During Sputter Etch Pre-Cleaning of Via Contact

Aoyama, M. ; Ito, T. ; Shioya, Y.

Pub. info.:	Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes. pp.175-182, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-30

Conference Proceedings

3. Spectral ellipsometry of binary optic gratings

Pistora, J. ; Yamaguchi, T. ; Vlcek, J. ; Mistrik, J. ; Horie, M. ; Smatko, V. ; Kovacova, E. ; Postava, K. ; Aoyama, M.

Pub. info.:	13th Polish-Czech-Slovak conference on wave and quantum aspects of contemporary optics : 9-13 September 2002, Krzyżowa. Poland. pp.415-422, 2003. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5259

Conference Proceedings

4. Deposition of Chemical Components in Japan

Dokiya, Y. ; Aoyama, M. ; Katsuragi, Y. ; Yoshimura, E. ; Toda, S.

Pub. info.:	The Chemistry of acid rain : sources and atmospheric processes. pp.258-, 1987. Washington, D.C.. American Chemical Society
Title of ser.:	ACS symposium series
Ser. no.:	349

Conference Proceedings

5. Nanostructures formation on surface of 6H-SiC by N2 laser radiation

Medvid, A. ; Berzina, B. ; Trinklere, L. ; Fedorenko, L. ; Lytvyn, P. ; Malevich, V. ; Yamaguchi, T. ; Aoyama, M.

Pub. info.:	Advanced organic and inorganic optical materials : 19-22 August 2002, Riga, Latvia. pp.427-433, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5122

Conference Proceedings

6. X-ray radiation of clusters irradiated by ultrafast high-intensity laser pulses

Fukuda, Y. ; Akahane, Y. ; Aoyama, M. ; Inoue, N. ; Ueda, H. ; Kishimoto, Y. ; Yamakawa, K. ; Faenov, A. Ya. ; Magunov, A. I. ; Pikuz, T. A. ; Skobelev, I. Y. ; Abdallah, J. Jr. ; Csanak, G. ; Boldarev, A. S. ; Gasilov, V. A.

Pub. info.:	Laser-generated and other laboratory X-ray and EUV sources, optics, and applications : 4-6 August 2003, San Diego, California, USA. pp.234-243, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5196

Conference Proceedings

7. Effects of Heat Treatment and Alloying of Spheroidal Graphite Cast Iron on Corrosion Resistance in Aqueous Environment

Aoyama, M. ; Tahashi, K. ; Matsuno, K.

Pub. info.:	Designing, processing and properties of advanced engineering materials : proceedings of the 3rd International Symposium on Designing, Processing and Properties of Advanced Engineering Materials, held in Jeju, Korea, November 5-8, 2003. pp.533-536, 2004. Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	449-452

Conference Proceedings

8. Thermal Desorption Spectroscopy (TDS) Study on the Corrosion Suppression Mechanism After Aluminum Etching by O2+H2O Downstream Ashing

Kojiri, H. ; Nakamura, M. ; Aoyama, M. ; Matsunaga, D.

Pub. info.:	ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology. pp.209-217, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	95-5

Conference Proceedings

9. Categorical color response of chromatic lights in the entire visual field

Sakurai, M. ; Sakamoto, C. ; Ayama, M. ; Aoyama, M. ; Sugita, S.

Pub. info.:	Human vision and electronic imaging VII : 21-24 January 2002, San Jose, USA. pp.474-481, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4662

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Technical Paper

10. Visual Study Focused on the Combustion Problem in Gasoline Direct Injection Engine.

Tajima, H. ; Nakashima, M. ; Sawada, M. ; Aoyama, M.

Pub. info.:	2003 Small Engine Technology Conference and Exhibition : SAE technical paper. 2003. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2003

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