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14 results

Conference Proceedings

1. The current progress of measurement standards for vibration in NMIJ/AIST

Usuda, T. ; Ohta, A. ; Ishigami, T. ; Fuchiwaki, O. ; Misaki, D. ; Aoyama, H. ; Sato, S.

Pub. info.:	Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications : 22-25 June 2004, Ancona, Italy. pp.30-38, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5503

Conference Proceedings

2. Preliminary implementation of primary calibration system for laser vibrometer [6345-03]

Oota, A. ; Usuda, T. ; Ishigami, T. ; Nozato, H. ; Aoyama, H. ; Sato, S.

Pub. info.:	Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications : 19-22 June 2006, Ancona, Italy. pp.634503-634503, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6345

Conference Proceedings

3. Effect of Cold Working and Aging on High Temperature Deformation of High Mn Stainless Steel

Yoshikawa, M. ; Matsuki, R. ; Habara, Y. ; Aoyama, H.

Pub. info.:	High nitrogen steels '98 : proceedings of the 5th International Conference on High Nitrogen Steels, held in Espoo, Finland, May 24-26, and Stockholm, Sweden, May 27-28, 1998. pp.421-426, 1999. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	318-320

Technical Paper

4. Intelligent CAD Tool to Solve Challenges in the Design of Orbiting EDM Electrode.

Sriani, T. ; Aoyama, H.

Pub. info.:	2011 SAE world congress : technical paper. 2011. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2011

Technical Paper

5. Development of Metal Pushing V-Belt for Continuously Variable Transmission. - Investigation for Clearance Between Elements, Strength of Element and Strength of Ring Material -

Yanasaki, T. ; Kanehara, S. ; Aoyama, H. ; Ishii, K. ; Okada, Y.

Pub. info.:	2003 SAE world congress : technical paper. 2003. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2003

Conference Proceedings

6. Dry-etch resistance of fluorine functionalized polymers

Koh, M. ; Ishikawa, T. ; Araki, T. ; Aoyama, H. ; Yamashita, T. ; Yamazaki, T. ; Watanabe, H. ; Toriumi, M. ; Itani, T.

Pub. info.:	Advances in Resist Technology and Processing XIX. Part One pp.486-496, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4690

Conference Proceedings

7. Characterization of TFE/norbornene-based fluoropolymer resist for 157-nm lithography

Hagiwara, T. ; Furukawa, T. ; Itani, T. ; Fujii, K. ; Ishikawa, T. ; Koh, M. ; Kodani, T. ; Moriya, T. ; Yamashita, T. ; Araki, T. ; Toriumi, M. ; Aoyama, H.

Pub. info.:	Advances in Resist Technology and Processing XXI. pp.159-168, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5376

Conference Proceedings

8. The dissolution behavior of tetrafluoroethylene-based fluoropolymers for 157-nm resist materials

Ishikawa, T. ; Kodani, T. ; Koh, M. ; Moriya, T. ; Araki, T. ; Aoyama, H. ; Yamashita, T. ; Toriumi, M. ; Hagiwara, T. ; Furukawa, T. ; Itani, T. ; Fujii, K.

Pub. info.:	Advances in Resist Technology and Processing XXI. pp.169-177, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5376

Conference Proceedings

9. Novel main-chain-fluorinated polymers for 157-nm photoresists

Toriumi, M. ; Koh, M. ; Ishikawa, T. ; Kodani, T. ; Araki, T. ; Aoyama, H. ; Yamashita, T. ; Yamazaki, T. ; Furukawa, T. ; Itani, T.

Pub. info.:	Advances in Resist Technology and Processing XX. 1 pp.53-60, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5039

10.

Conference Proceedings

10. Synthesis of novel fluorinated norbornene derivatives for 157-nm application

Koh, M. ; Ishikawa, T. ; Toriumi, M. ; Araki, T. ; Yamashita, T. ; Aoyama, H. ; Yamazaki, T. ; Furukawa, T. ; Itani, T.

Pub. info.:	Advances in Resist Technology and Processing XX. 1 pp.589-599, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5039

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Author: Aoyama, H.