1.

Conference Proceedings
Conference Proceedings
1. DEVICE APPLICATION AND GROWTH MECHANISM FOR HEMISPHERICAL-GRAINED Si
Watanabe, H. ; Aoto, N. ; Adachi, S. ; Kikkawa, T.
Pub. info.: Amorphous silicon technology 1991 : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.401-406,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 219
2.

Conference Proceedings
Conference Proceedings
2. CONTROL OF NATiVE OXIDES ON DEEP-SUBMICRON CONTACT-HOLE-BOTTOM SURFACES
Aoto, N. ; Nakamori, M. ; Hada, H. ; Kunio, T. ; Teraoka, Y. ; Nishiyama, I. ; Ikawa, E.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.65-69,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7