1.

Conference Proceedings
Conference Proceedings
1. Phase standard based on profilometer metrology standard
Hughes, G. P. ; Goodman, C. ; Antesberger, G. ; Burges, S. ; Morrison, T. B. ; Buxbaum, A. H.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.1117-1123,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567
2.

Conference Proceedings
Conference Proceedings
2. Analysis of the Vistec LMS IPRO3 performance and accuracy enhancement techniques [6349-59]
Antesberger, G. ; Knoth, S. ; Laske, F. ; Rudolf, J. ; Cotte, E. ; Alles, B. ; Blasing, C. ; Fricke, W. ; Rinn, K.
Pub. info.: Photomask Technology 2006.  pp.63491M-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
3.

Conference Proceedings
Conference Proceedings
3. Pellicle choice for 193-nm immersion lithography photomasks
Cotte, E. P. ; HaBler, R. ; Utess, B. ; Antesberger, G. ; Kromer, F. ; Teuber, S.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.511-520,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567