1.

Conference Proceedings
Conference Proceedings
1. CMP Integration Issues for Sub-0.l5μm Process Technologies
Weling, Milind ; Dunton, Vance ; Zhang, Liming ; Annapragada, Rao
Pub. info.: Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium.  pp.517-533,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-37
2.

Conference Proceedings
Conference Proceedings
2. New Challenges in Plasma Etching for Low-k Dual Damascene
Li, Andrew ; Tietz, James ; Zhu, Helen ; Helmer, Bryan ; Pirkle, David ; Annapragada, Rao ; Chien, Ting ; Sadjadi, Reza
Pub. info.: Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology.  pp.531-538,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-17