Strupp, Paul G. ; Alstrin, April L. ; Korte, Brenda J. ; Leone, Stephen R.
Pub. info.:
Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.. pp.27-32, 1992. Pittsburgh, Pa.. Materials Research Society
Alstrin, April L. ; Kunz, Adina K. ; Strupp, Paul G. ; Leone, Stephen R.
Pub. info.:
Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.359-, 1994. Pittsburgh. MRS - Materials Research Society
Ott, Adina K. ; Casey, Sean M. ; Alstrin, April L. ; Leone, Stephen R.
Pub. info.:
Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.101-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society