1.

Conference Proceedings
Conference Proceedings
1. 38 Structural and Electrical Properties of CVD-WNx Thin Films Deposited on High-K Materials
Allegret, S. ; Rolland, G. ; Guidotti, E. ; Yamasaki, H. ; Holliger, P. ; Pierre, F. ; Martin, F.
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium.  pp.324-330,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-05
2.

Conference Proceedings
Conference Proceedings
2. Study of Work Function of CVD WSix Thin Film on High-k Dielectric
Maitrejean, S. ; Allegret, S. ; Fillot, F. ; Farjot, T. ; Guillaumot, B. ; Passemard, G.
Pub. info.: Fundamentals of novel oxide/semiconductor interfaces : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A..  pp.285-290,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 786