1.

Conference Proceedings
Conference Proceedings
1. Micromachined, Electrostatically-Actuated Optical Attenuators/Switches Fabricated by Fusion Bonding of Single-Crystal, Ultra-Thin Silicon Wafers
Brown, R.A. ; Aksyuk, V.A. ; Farmer, K.R.
Pub. info.: Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia.  pp.407-414,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-35
2.

Conference Proceedings
Conference Proceedings
2. MEMS mirror array for a wavelength-selective 1xK switch (Invited Paper)
Lopez, D.O. ; Pardo, F. ; Aksyuk, V.A. ; Simon, M.E. ; Shea, H.R. ; Marom, D.M. ; Neilson, D.T. ; Cirelli, R.A. ; Klemens, F.P. ; Mansfield, W.M. ; Fetter, L.A. ; Bower, E. ; Miner, J.F. ; Sorsch, T.W.
Pub. info.: Smart Sensors, Actuators, and MEMS.  2  pp.445-455,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5116
3.

Conference Proceedings
Conference Proceedings
3. Optical MEMS devices for telecom systems (Invited Paper)
Pardo, F. ; Aksyuk, V.A. ; Arney, S. ; Bair, H. ; Basavanhally, N.R. ; Bishop, D.J. ; Bogart, G.R. ; Bolle, C.A. ; Bower, J.E. ; Carr, D. ; Chan, H.B. ; Cirelli, R.A. ; Ferry, E. ; Frahm, R.E. ; Gasparyan, A. ; Gates, J.V. ; Giles, C.R. ; Gomez, L. ; Goyal, S. ; Greywall, D.S. ; Haueis, M. ; Keller, R.C. ; Kim, J. ; Klemens, F.P.
Pub. info.: Smart Sensors, Actuators, and MEMS.  2  pp.435-444,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5116