1.

Conference Proceedings
Conference Proceedings
1. A DESIGN OF EXPERIMENTS APPROACH TO AN OPTIMIZED SC-1/MEGASONIC CLEAN FOR SUB-0.15 MICRON PARTICLE REMOVAL
Resnick, P.J. ; Adkins, C.L.J. ; Clews, P.J. ; Thomas, E.V. ; Cannaday, S.T.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.450-457,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
2.

Conference Proceedings
Conference Proceedings
2. SULFURIC ACID/HYDROGEN PEROXIDE RINSING STUDY
Clews, P.J. ; Nelson, G.C. ; Matlock, C.A. ; Resnick, P.J. ; Adkins, C.L.J. ; Korbe, N.C.
Pub. info.: Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.66-73,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-20
3.

Conference Proceedings
Conference Proceedings
3. A STUDY OF LIGHT POINT DEFECT REMOVAL BY SC-1 CHEMISTRIES
Resnick, P.J. ; Adkins, C.L.J. ; Matlock, C.A. ; Kelly, M.J. ; Clews, P.J. ; Korbe, N.C.
Pub. info.: Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.589-596,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-20