1.

Conference Proceedings
Conference Proceedings
1. CHEMICAL BEAM DEPOSITION OF Y2O3 THIN FILMS WITH AN ECER
Massimo, M. ; Varhue, W. ; Adams, E. ; Titcomb, S.
Pub. info.: Synthesis and processing of ceramics--scientific issues : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.233-238,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 249
2.

Conference Proceedings
Conference Proceedings
2. Low-Temperature Growth of Si:Er by Electron Cyclotron Resonance PECVD Using Metal Organics
Andry, P. S. ; Varhue, W. J. ; Adams, E. ; Lavoie, M. ; Klein, P. B. ; Hengehold, R. ; Hunter, J.
Pub. info.: Rare earth doped semiconductors II : symposium held April 8-10, 1996, San Francisco, California, U.S.A..  pp.57-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 422
3.

Conference Proceedings
Conference Proceedings
3. Stress Generation in PECVD silicon Nitride Thin Films for Microelectronics Applications
Belyansky, M. ; Klymko, N. ; Madan, A. ; Mallikarjunan, A. ; Li, Y. ; Chakravarti, A. ; Deshpande, S. ; Domenicucci, A. ; Bedell, S. ; Adams, E. ; Coffin, J. ; Tai, L. ; Sun, S-P. ; Widodo, J. ; Lai, C-W.
Pub. info.: Materials, technology and reliability of advanced interconnects - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.97-102,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 863
4.

Conference Proceedings
Conference Proceedings
4. Stress Generation in PECVD Silicon Nitride Thin Films for Microelectronics Applications
Belyansky, M. ; Klymko, N. ; Madan, A. ; Mallikarjunan, A. ; Li, Y. ; Chakravarti, A. ; Deshpande, S. ; Domenicucci, A. ; Bedell, S. ; Adams, E. ; Coffin, J. ; Tai, L. ; Sun, S-P. ; Widodo, J. ; Lai, C-W.
Pub. info.: Thin films : stresses and mechanical properties XI : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.325-332,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 875