1.

Conference Proceedings
Conference Proceedings
1. Characterization and applications of an in-scanner aerial image detection system [6152-111]
Hunsche, S. ; Gassner, M. J. ; Schefske, J. A. ; Kent, E. R. ; Acheta, A.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61522U-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
2.

Conference Proceedings
Conference Proceedings
2. The transfer of photoresist LER through etch [6153-45]
Pawloski, A. R. ; Acheta, A. ; Bell, S. ; La Fontaine, B. ; Wallow, T. ; Levinson, H. J.
Pub. info.: Advances in Resist Technology and Processing XXIII.  pp.615318-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6153
3.

Conference Proceedings
Conference Proceedings
3. Study of the influence of substrate topography on the focusing performance of advanced lithography scanners
Fontaine, B.M.L. ; Hauschild, J. ; Dusa, M.V. ; Acheta, A. ; Apelgren, E.M. ; Boonman, M. ; Krist, J. ; Khathuria, A. ; Levinson, H.J. ; Fumar-Pici, A. ; Pieters, M.
Pub. info.: Optical Microlithography XVI.  Part One  pp.570-581,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
4.

Conference Proceedings
Conference Proceedings
4. Flare and its impact on low-k1 KrF and ArF lithography
La Fontaine, B. ; Dusa, M.V. ; Acheta, A. ; Chen, C. ; Bourov, A. ; Levinson, H.J. ; Litt, L.C. ; Mulder, M. ; Seltman, R. ; van Praagh, J.
Pub. info.: Optical Microlithography XV.  Part One  pp.44-56,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
5.

Conference Proceedings
Conference Proceedings
5. Spherical aberration measurement and in-situ correction
Acheta, A. ; Kye, J. ; Levinson, H.J.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1474-1479,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
6.

Conference Proceedings
Conference Proceedings
6. Influence of antireflection coatings in ArF lithography
La Fontaine, B.M. ; Pawloski, A.R. ; Acheta, A. ; Deng, Y. ; Levinson, H.J. ; Spence, C. ; Chovino, C. ; Dieu, L. ; Johnstone, E. ; Kalk, F.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.995-1005,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
7.

Conference Proceedings
Conference Proceedings
7. Understanding the role of base quenchers in photoresists
Michaelson, T.B. ; jamieson, A.T. ; Pawloski, A.R. ; Byers, J.D. ; Acheta, A. ; Willson, C.G.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.1282-1294,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
8.

Conference Proceedings
Conference Proceedings
8. Characterization of line-edge roughness in photoresist using an image fading technique
Pawloski, A.R. ; Acheta, A. ; Lalovic, I. ; Fontaine, B.M.L. ; Levinson, H.J.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.414-425,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
9.

Conference Proceedings
Conference Proceedings
9. Analysis of focus errors in lithography using phase-shift monitors
La Fontaine, B. ; Dusa, M.V. ; Krist, J. ; Acheta, A. ; Kye, J. ; Levinson, H.J. ; Luijten, C. ; Sager, C.B. ; Thomas, J. ; van Praagh, J.
Pub. info.: Optical Microlithography XV.  Part One  pp.315-324,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691