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Verd, J. ; Teva, J. ; Abadal, G. ; Perez-Murano, F. ; Esteve, J. ; Barniol, N.
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Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain. pp.98-106, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Optical microstructural characterization of semiconductors : sympoisum held November 29-30, 1999, Boston, Massachusetts, U.S.A.. pp.37-, 2000. Warrendale, Pa.. MRS-Materials Research Society