1.

Conference Proceedings
Conference Proceedings
1. Effect of Particle Deposition and Wet/Dry Cleaning Methods on Particle Removal Efficiency
T. Kim ; S. Hu ; A.A. Busnaina ; J. Park
Pub. info.: Cleaning and surface conditioning technology in semiconductor device manufacturing 10.  pp.361-367,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(2)
2.

Conference Proceedings
Conference Proceedings
2. Quantitative Measurement of Pattern Collapse and Particle Removal Force
T. Kim ; K.L. Wostyn ; P. Mertens ; A.A. Busnaina ; J. Park
Pub. info.: Cleaning and surface conditioning technology in semiconductor device manufacturing 10.  pp.123-129,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(2)