1.

Conference Proceedings

Conference Proceedings
A. Votta ; E. Bellandi ; M. Alessandri ; A. Vedda ; A. Ferretti
Pub. info.: Cleaning and surface conditioning technology in semiconductor device manufacturing 10.  pp.239-246,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(2)
2.

Conference Proceedings

Conference Proceedings
M. Nikl ; E. Mihokova ; V. Laguta ; J. Pejchal ; S. Baccaro ; A. Vedda
Pub. info.: Damage to VUV, EUV, and X-ray optics : 18-19 April 2007,Prague, Czech Republic.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6586