P.C. Tsiartas ; L.L. Simpson ; A. Qin ; C.G. Willson ; R.D. Allen
Pub. info.:
Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California. pp.261-271, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 2 pp.728340-1-728340-6, 2009. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Advances in resist materials and processing technology XXV. 2 pp.692336-1-692336-11, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Optoelectronic technology and instruments, control theory and automation, and space exploration : Seventh International Symposium on Instrumentation and Control Technology : 10-13 October 2008, Beijing, China. pp.712913-1-712913-4, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Optoelectronic technology and instruments, control theory and automation, and space exploration : Seventh International Symposium on Instrumentation and Control Technology : 10-13 October 2008, Beijing, China. pp.712912-1-712912-4, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering